Wafer Management System
- ID number read location and label attach location can be set arbitrarily
Wafer ID read location and barcode attach location can be set with ease by using a X, Y, Θ robot.
- High-Performance Vision System
High performance, high speed system is available for requirements with better image processing capabilities. Provides great precision of wafer ID recognition even to images with noise.
- Easily Installed in Existing Lines
As a stand-alone system, it is easy to install into an existing line.
- Host Communication Function
(Communication Format: Conforms to SECS-I and HSMS/Software: Conforms to GEM)