Wafer Management System

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  1. ID number read location and label attach location can be set arbitrarily
    Wafer ID read location and barcode attach location can be set with ease by using a X, Y, Θ robot.
  2. High-Performance Vision System
    High performance, high speed system is available for requirements with better image processing capabilities. Provides great precision of wafer ID recognition even to images with noise.
  3. Easily Installed in Existing Lines
    As a stand-alone system, it is easy to install into an existing line.
  • Host Communication Function
    (Communication Format: Conforms to SECS-I and HSMS/Software: Conforms to GEM)